Electron beam (e-beam) evaporation,
also known as electron beam deposition, is the most versatile and commonly used
technique for the physical vapor deposition process. In this technique, the target
material is bombarded with an electron beam. The source of the electron beam is
a charged tungsten filament. Once the target material is heated and reaches the
required temperature, it starts evaporating. The gaseous substance, which is
obtained from this evaporation process, is transported to the substrate
material and deposited to form a thin coating layer. The deposition is possible
here due to the precipitation of vaporized atoms or molecules in a vacuum
chamber.
The whole apparatus that facilitates
this e-beam evaporation process is known as the electron
beam evaporator system.
The e-beam deposition technique has several advantages for various
applications. Some of them are:
Ideal for metals with
high melting point
Since the e-beam deposition/evaporation, the system allows the direct transfer of energy with an electron beam to the target
material that needs to be evaporated and deposited on the substrate, it is
ideal for metals that have a high melting point.
Results in higher
deposition rates
The e-beam deposition system produces
higher deposition rates from 0.1nm per minute to 100nm per minute and is known
for allowing higher adhesion to the substrate. This is the reason when you need
quality thin coating films with higher density, electron beam deposition system
is the first choice.
Very high material
utilization efficiency
The e-beam system heats only the target
source material instead of the entire crucible. Therefore, thin films produced
by these systems possess a much higher purity level as there occurs a lower
degree of contamination from the crucible. This results in very high material
utilization efficiency and reduced costs when compared to other physical vapor
deposition systems.
Less damage to
substrate
Since the energy of the electron beam
is concentrated on the target material rather than the entire vacuum chamber,
e-beam evaporation technique minimizes the possibility of heat damage to the
substrate.
Suitable for lift-off
masking techniques
With the aid of a multiple crucibles
electron beam evaporator, many different layers of coatings from different
target materials can be formed without compromising the integrity of the vacuum
chamber. Thus, this system can also adapt to several lift-off masking
techniques.
Applications of an
electron beam evaporator system
As electron beam evaporator systems can
produce thin film coatings with desired conductive, reflective, and
transmissive qualities, they are used for:
- Optical thin films
- Laser optics
- Solar panels
- Eyeglasses
- Architectural glass
Besides, an electron
beam evaporator system is also highly suitable for a variety of
industries right from high-performance aerospace and automotive applications
where high temperature and wear resistance are critical to highly durable
coatings for cutting tools, chemical barriers, and protection in corrosive
environments, such as marine fittings.