The Inconel Substrate Heater for Reactive Deposition is an oxygen good warmer & heater intended for thin film oxide based procedures and vacuum applications, for example, pulsed laser deposition(PLD), responsive sputtering, compound vapor deposition(CVD), warm dissipation, and that's only the tip of the iceberg. With accuracy temperature control and warming consistency, these radiators are the ideal apparatus for affidavit of thin film materials.
Applications
• Vacuum Annealing, Doping, Catalytic Reaction
• In-Situ Surface Science, R and D
• Gas Sensor Temperature subordinate Characterization
• Epitaxy of Oxides, Nitrides, Carbides, Metals
Key Features
• Working temperatures up to 850¬∞C
• Perfect with responsive gases, for example, O2, NH3, SiH4, CH4
• Vacuum similarity from 10-8 Torr to 10-1 Torr
• Oxidation, consumption, and compound safe inconel composite material
• Warming component neckline for component assurance
Specification
• Greatest temperature of task up to 850¬∞C
• Vacuum similarity 10-8-10-7Torr
• Coordinated in-fabricated k-type temperature sensor thermocouple with expanded adaptable and protected thermocouple wires
• Adaptable glass fiber protected wire conduits for fueling
• Inconel neckline with tapped gaps for substrate clasping
• Accessible sizes From 0.5‚Ä≥ to 6‚Ä≥ distance across
• Predisposition ability
• Exactness temperature
• PID controlled power supply 110V-220V
• Simple to Install
Worked for accuracy temperature control and uniform warming, the Inconel Substrate Heater is the ideal device for an assortment of thin film applications. The oxidation and concoction safe metal combination warmer & heater is intended to achieve temperatures up to 850°C. It is good with receptive sputtering, PLD, PVD, e-shaft, warm dissipation, PECVD, ALD, in UHV or dormant (Ar, N2, He, H2) and responsive O2, Ozone, CO2, C2H2, CH4, NH3, SiH4, H2O, air and metal-natural forerunners from weight 10E-1 Torr through high vacuum up to 10E-8 Torr.
The temperature consistency is inside 5-10%. All substrate warmer & heater models accompany stainless steel shield/neckline with 6 x4-40 tapped gaps for test bracing. They have incorporated inbuilt K-type thermocouple (with 24″ inch long adaptable fiber glass protected links) mounted from posterior drawing closer close to the surface of the hot surface for precise temperature estimation. Radiator and thermocouple wires have two 36″ long glass fiber protected and adaptable conduits for warmer & heater power and temperature estimation, separately.
Blue Wave's radiator's back plate has one 10-32 tapped gap in the inside for warmer & heater mounting. The Inconel Substrate Heater is the best and appropriate for doping, epitaxial development, synergist responses, in-situ surface science as a component of temperature, and strengthening of nitrides, oxides, carbides, amalgams, metals, graphene, precious stone, CNTs, and complex multicomponent and multilayer thin movies. It can likewise be utilized for gas sensor portrayal, temperature subordinate electrical estimation of gadgets at high temperature in air, vacuum or N2 atm.
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